FineGFP – 株式会社ジーダット https://www.newjedat.arum-net.com/en Wed, 12 Oct 2022 03:05:27 +0000 en-US hourly 1 https://www.newjedat.arum-net.com/wp-content/uploads/2022/05/cropped-super-big-icon-32x32.jpg FineGFP – 株式会社ジーダット https://www.newjedat.arum-net.com/en 32 32 Reticle Design https://www.newjedat.arum-net.com/en/fpd_design/reticle-2/ Sat, 26 Feb 2022 12:21:59 +0000 https://www.jedat.co.jp/?page_id=10541 Reticle Design

Supports Reticle Design for Stepper Type Exposure Equipment

  • Explore imposition method
  • Creates reticle cells
  • Divides panels according to  the stepper method

Reticle Floor Plan Tool

SX-Meister FineRFP

■Supports Reticle Design

  • Automatic cell division and automatic blind and auxiliary pattern generation
  • Easy to explore the shot placement
    Cross probe between the glass substrate and reticle
  • Abundant check function
    Stage movable amount, exposure possibility check considering stroke, blind area check, clearance check between shots, stroke violation check
  • Outputs recipe information (shot, center coordinate output of alignment mark <CSV, Text>)

Glass Floor Plan Tool

SX-Meister FineGFP

■Supports glass substrate designs include multiple impositions

  • Designs glass substrate from basic shots and reticle parameter information
    ・ Supports multiple imposition conditions
    ・ Outputs glass substrate and reticle cell
  • Estimates the optimum recipe information from the glass substrate and shot information
  • Outputs imposition and recipe information from glass substrate and reticle information
  • Highlights shots from recipe information

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